Fabrication scheme for dense aquatic flow sensor arrays

Izadi, N. and Boer de, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7-10 September 2008, Dresden, Germany.

Preview

PDF
480Kb

Abstract:	A fabrication scheme to realize dense arrays of flexible, closed membranes with a small gap separating them from the substrate is presented. These membranes are the first step towards aquatic hair based flow sensors biomimicking fish lateral line. Electrodes are integrated underneath the membrane to avoid contact with the liquid. Arrays of membranes with a diameter of 100 μm, gap height of 3 μm, and mutual distance of 200 μm have been successfully fabricated.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/65016
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Repository Staff Only: item control page

Metis ID: 251208