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The item you are trying to access was a duplicate of:
Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M. (2000) Etching pits and dislocations in Si{111}. Sensors and Actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247