New class of thermal flow sensors using \[\Delta\]T = 0 as a control signal


Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) New class of thermal flow sensors using \[\Delta\]T = 0 as a control signal. In: 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), 23 - 27 Jan 2000, Miyazaki, Japan (pp. pp. 525-530).

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Abstract:In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences on simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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