Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Keur, W. and Mauczock, R. and Schmitz, J. and Hueting, R.J.E. (2008) Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In: 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-27 March 2008, Edinburgh, Schotland.

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Abstract:	A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1–8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
Item Type:	Conference or Workshop Item
Copyright:	© 2008 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/64874
Official URL:	http://dx.doi.org/10.1109/ICMTS.2008.4509337
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