Silicon oxynitride based photonics


Wörhoff, K. and Klein, E.J. and Hussein, M.G. and Driessen, A. (2008) Silicon oxynitride based photonics. In: Proceedings 10th Anniversary International Conference on Transparant Optical Networks (ICTON), 22-26 June 2008, Athens, Greece (pp. pp. 266-269).

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Abstract:Silicon oxynitride is a very attractive material for integrated optics. Besides possessing excellent optical properties it can be deposited with refractive indices varying over a wide range by tuning the material composition. In this contribution we will summarize the key properties of this material class and discuss several application examples. Preliminary results on novel processes, which will lead to largely reduced hydrogen incorporation and enable reflow of SiON material, are being presented.
Item Type:Conference or Workshop Item
Additional information:Invited talk - Paper Th.B3.4
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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