Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Ridder de, R.M. and Krijnen, G.J.M. (2008) Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes. In: 9th European Conference on Optical Chemical Sensors and Biosensors, Europtrode IX, March 30 - April 2, 2008, Dublin, Ireland.

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Abstract:	The paper reports on theoretical and experimental results of integrated optical (IO) cavities defined by grated waveguides in $Si_3N_4$ and Si, for the accurate detection of cantilever deflection and bulk index changes.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/64859
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Metis ID: 251060