Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Ridder de, R.M. and Krijnen, G.J.M. (2008) Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In: 14th European Conference on Integrated Optics, ECIO, 11-13 June 2008, Eindhoven, The Netherlands.

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Abstract:	We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/64858
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