A micromachined surface stress sensor with electronic readout

Carlen, E.T. and Weinberg, M.S. and Zapata, A.M. and Borenstein, J.T. (2008) A micromachined surface stress sensor with electronic readout. Review of scientific instruments, 79 (1). 015106. ISSN 0034-6748

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Abstract:	A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filtered resulting in a dc output voltage proportional to the change in differential surface stress. The differential surface stress change of the Au111 coated silicon sensors due to chemisorbed alkanethiols is s −0.42 ± 0.0028 N m−1 for 1-dodecanethiol DT and −0.14 ± 0.0028 N m−1 for 1-butanethiol BT. The estimated measurement resolution 1 Hz bandwidth is 0.12 mN m−1 DT: 0.2 pg mm−2 and BT: 0.8 pg mm−2 and as high as 3.82 N m−1 DT: 8 fg mm−2 and BT: 24 fg mm−2 with system optimization. © 2008 American Institute of Physics.
Item Type:	Article
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/64853
Official URL:	http://dx.doi.org/10.1063/1.2830938
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