Adaptive reductions of the vibrations from a vacuum pump for high-precision equipment

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Berkhoff, A.P. and Wesselink, J.M. and Basten, T.G.H. (2008) Adaptive reductions of the vibrations from a vacuum pump for high-precision equipment. In: Adaptronic Congress 2008, 20-21 May 2008, Berlin, Germany (pp. pp. 53-56).

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Abstract:This paper describes experiments with active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced with a novel adaptive control scheme in a multi-input multi-ouput feedback configura-tion. Due to the efficiency of the algorithm, relatively high sampling rates of 12 kHz were possible. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Combined with the use of programmable digital minimum-phase reconstruction and anti-aliasing filters on dedicated hardware, effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to an average broadband reduction on the error sensors of 11.3 dB.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64774
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