Biomolecular sensing using surface micromachined silicon plates


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Zapata, A.M. and Carlen, E.T. and Kim, E.S. and Hsiao, J. and Traviglia, D. and Weinberg, M.S. (2007) Biomolecular sensing using surface micromachined silicon plates. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 831-834).

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Abstract:Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64626
Official URL:http://dx.doi.org/10.1109/SENSOR.2007.4300259
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