Biomolecular sensing using surface micromachined silicon plates


Zapata, A.M. and Carlen, E.T. and Kim, E.S. and Hsiao, J. and Traviglia, D. and Weinberg, M.S. (2007) Biomolecular sensing using surface micromachined silicon plates. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 831-834).

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Abstract:Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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