Focused ion beam nano-structuring of photonic Bragg gratings in $Al_2O_3$ waveguides


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Uranga, Amaia and Ay, Feridun and Bradley, Jonathan D.B. and Ridder de, René M. and Wörhoff, Kerstin and Pollnau, Markus (2007) Focused ion beam nano-structuring of photonic Bragg gratings in $Al_2O_3$ waveguides. In: IEEE/LEOS Benelux Chapter 2007, 17-18 December 2007, Brussels, Belgium.

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Abstract:Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integrated optical components such as waveguide amplifiers and lasers. Si-technology compatible low-loss $Al_2O_3$ channel waveguides grown on thermally oxidized silicon substrates have been reported recently. We used FIB milling for reflection grating definition on Al2O3 channel and ridge waveguides. Structural optimization has been achieved by experimentally adjusting FIB patterning parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and sidewall definition improvement. Optical properties of these devices are currently being studied.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64610
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