Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets


Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets. In: IEEE Sensors 2007, 28-31 October 2007, Atlanta, GA, USA (pp. pp. 1073-1076).

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Abstract:In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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