Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets


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Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets. In: IEEE Sensors 2007, 28-31 October 2007, Atlanta, GA, USA (pp. pp. 1073-1076).

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Abstract:In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64603
Official URL:http://dx.doi.org/10.1109/ICSENS.2007.4388591
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