Simulation of a Nanolink Hot-Plate Device

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 November 2007, Veldhoven, The Netherlands.

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Abstract:	In this work, a miniaturized hotplate device with a low power consumption of a few milliwatts and a CMOS compatible fabrication process is proposed and analyzed. This micro hotplate is based on a nanoscopic conductive link (Ø 10- 100 nm) created between two electrodes separated by a SiO2 layer and can be used as chemical sensor and actuator. A typical foreseen application is a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. In this paper, simulation results are presented showing the electrical and thermal properties of these newly designed nanoscopic–link based devices. Index Terms— Hot Surface, Chemical Sensor, Chemical Actuator, Pellistor, Microreactor
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/64585
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Metis ID: 245951