Considerations on using SU-8 as a construction material for high aspect ratio structures

Melai, Joost and Salm, Cora and Smits, Sander and Blanco Carballo, Víctor M. and Schmitz, Jurriaan and Hageluken, Ben (2007) Considerations on using SU-8 as a construction material for high aspect ratio structures. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov. 2007, Veldhoven, The Netherlands.

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Abstract:	This paper discusses two material aspects of SU-8 that have up till now been insufficiently documented. We present initial results on the outgassing behavior and a study on the dielectric properties of SU-8 at high bias voltage. The dielectric strength is determined to be at least 2 MV/cm. These elements are investigated in the light of plans to manufacture an SU-8 based Micro-Channel Plate (MCP). Although the outgassing properties and dielectric strength are favorable the patterning capabilities are expected to limit the use of such an MCP.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/64581
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Metis ID: 245947