Considerations on using SU-8 as a construction material for high aspect ratio structures


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Melai, Joost and Salm, Cora and Smits, Sander and Blanco Carballo, Víctor M. and Schmitz, Jurriaan and Hageluken, Ben (2007) Considerations on using SU-8 as a construction material for high aspect ratio structures. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov. 2007, Veldhoven, The Netherlands.

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Abstract:This paper discusses two material aspects of SU-8 that have up till now been insufficiently documented. We present initial results on the outgassing behavior and a study on the dielectric properties of SU-8 at high bias voltage. The dielectric strength is determined to be at least 2 MV/cm. These elements are investigated in the light of plans to manufacture an SU-8 based Micro-Channel Plate (MCP). Although the outgassing properties and dielectric strength are favorable the patterning capabilities are expected to limit the use of such an MCP.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64581
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