Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening


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Floris, J. and Izadi, N. and Jaganatharaja, R.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening. In: 14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2007, 10-14 June 2007, Lyon, France.

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Abstract:This paper presents the results of active adaptation of sensor sensitivity. By applying a DC-bias voltage to the sensing electrodes of a cricket inspired artificial hair sensor the effective spring stiffness can be adapted resulting in a reduced resonance frequency and increased sensitivity. An array of flow sensors was actuated using electrical and acoustical signals at different values of the DC-bias voltage. Characterization was done using a scanning laser vibrometer. Both resonance frequency versus applied DC-bias voltage and deflection-amplitude versus DC-bias voltage behave well in accordance to theory and show that adaptation by DC-biasing can be used for frequency focusing and increasing sensitivity.
Item Type:Conference or Workshop Item
Copyright:© 2006 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64275
Official URL:http://dx.doi.org/10.1109/SENSOR.2007.4300368
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