Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees


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Tiggelman, M.P.J. and Reimann, K. and Schmitz, J. (2007) Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2007, 19-22 March 2007, Tokyo, Japan (pp. pp. 200-205).

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Abstract:During the AC impedance characterization of devices, from the kHz-range up to the GHz-range, accuracy can be lost when a DC voltage is applied. Commercial high-voltage broadband bias-tees are often voltage-dependent, which can cause inaccuracies at low frequencies. A calibration technique with applied bias significantly improves the measurement accuracy.
Additionally, a bias-tee has been developed with a voltageindependent capacitor, suitable for DC voltages up to 500 V showing excellent performance up to several gigahertz. PIN diode limiters protect the measurement equipment from damage in case of a device breakdown.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/64167
Official URL:http://dx.doi.org/10.1109/ICMTS.2007.374483
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