Analysis of a three-dimensional particle velocity sensor for design optimization

Honschoten van, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of Micromechanics and Microengineering, 17 (7). S137-S146. ISSN 0960-1317

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Abstract:	The omni-directional sensitivity pattern of an integrated, three-dimensional acoustic sensor consisting of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. The influence of the probe surface on the measured direction of particle velocity is nvestigated and a description of the gas flow profile around the integrated sensor is presented. A theoretical model describing the fluid flow in the vicinity of a simplified geometry, a plate of finite width, is shown to give a relatively adequate description for the gas flow around the probe. The analysis results in a number of design rules to optimize the device performance.
Item Type:	Article
Copyright:	© 2007 IOP Publishing
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/64018
Official URL:	http://dx.doi.org/10.1088/0960-1317/17/7/S11
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