Analysis of a three-dimensional particle velocity sensor for design optimization


Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of Micromechanics and Microengineering, 17 (7). S137-S146. ISSN 0960-1317

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Abstract:The omni-directional sensitivity pattern of an integrated, three-dimensional acoustic sensor consisting of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. The influence of the probe surface on the measured direction of particle velocity is nvestigated and a description of the gas flow profile around the integrated sensor is presented. A theoretical model describing the fluid flow in the vicinity of a simplified
geometry, a plate of finite width, is shown to give a relatively adequate description for the gas flow around the probe. The analysis results in a number of design rules to optimize the device performance.
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Copyright:© 2007 IOP Publishing
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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