An integrated gaseous detector using microfabrication post-processing technology


Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Chefdeville, M. and Graaf, H. van der and Timmermans, J. and Visschers, J.L. (2006) An integrated gaseous detector using microfabrication post-processing technology. In: 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 23-24 Nov. 2006, Veldhoven, The Netherlands (pp. pp. 369-372).

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Abstract:this paper presents the operational characteristics of several integrated Micromegas detectors. These detectors called InGrids are made by means of micro-electronic fabrication techniques. These techniques allow a large variety of detector geometry to be made and studied. Gain, gain homogeneity and energy resolution were measured for various amplification gap sizes, hole pitches and hole diameters in Argon/Isobutane. Gain measurements as a function of gap thickness are compared to the Rose and Korff formula and a model of the detector gain. Our model uses electric field maps and MAGBOLTZ calculated amplification coefficients.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 237711