Micromachined silicon plates for sensing molecular interactions


Carlen, E.T. and Weinberg, M.S. and Dube, C.E. and Zapata, A.M. and Borenstein, J.T. (2006) Micromachined silicon plates for sensing molecular interactions. Applied physics letters, 89 (17). pp. 173123-1. ISSN 0003-6951

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Abstract:A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing surface treated with a receptor layer sensitive to a target molecule, in this case Au(111). Chemisorption of an alkanethiol on the gold coated silicon surfaces results in plate bending. Plate displacements, measured with a phase scanning interferometer, indicate a differential surface stress change $\Delta \sigma_s$=-0.72 +/- 0.02 N m(-1) for 1-dodecanethiol.
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/63729
Official URL:http://dx.doi.org/10.1063/1.2364878
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