Micromachined silicon plates for sensing molecular interactions

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Carlen, E.T. and Weinberg, M.S. and Dube, C.E. and Zapata, A.M. and Borenstein, J.T. (2006) Micromachined silicon plates for sensing molecular interactions. Applied physics letters, 89 (17). pp. 173123-1. ISSN 0003-6951

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Abstract:A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing surface treated with a receptor layer sensitive to a target molecule, in this case Au(111). Chemisorption of an alkanethiol on the gold coated silicon surfaces results in plate bending. Plate displacements, measured with a phase scanning interferometer, indicate a differential surface stress change $\Delta \sigma_s$=-0.72 +/- 0.02 N m(-1) for 1-dodecanethiol.
Item Type:Article
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/63729
Official URL:http://dx.doi.org/10.1063/1.2364878
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