The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

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Kim, Phan Le and Lodder, Cock and Luong, Nguyen Hoang and Hien, Than Duc (1999) The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 117-120. ISSN 0304-8853

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Abstract:In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.
Item Type:Article
Copyright:© 1993 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:http://purl.utwente.nl/publications/62977
Official URL:http://dx.doi.org/10.1016/S0304-8853(98)00412-0
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Metis ID: 111911