Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape

Keim, Enrico G. and Bijker, Martin D. and Lodder, J. Cock (2001) Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 19 (4). pp. 1191-1194. ISSN 0734-2101

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Abstract:	n this article a method is described for preparing cross sections of obliquely deposited metal thin films on polymer substrates for transmission electron microscopy (TEM) observation. The layers of interest are brittle in nature and therefore it is difficult to obtain suitable TEM samples with conventional methods. Apart from the sample preparation method some details of the deposition technique will be elucidated.
Item Type:	Article
Copyright:	© 2001 American Vacuum Society
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/62971
Official URL:	http://dx.doi.org/10.1116/1.1330259
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Metis ID: 202138