A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing


Blanco Carballo, V.M. and Chefdeville, M. and Graaf, H. van der and Salm, C. and Aarnink, A.A.I. and Smits, S.M. and Altpeter, D.M. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2006) A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. In: 32nd European Solid State Device Research Conference, 02-06 July 2006, Montreux, Switzerland (pp. pp. 129-132).

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Abstract:This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in
nuclear and high-energy physics to X-ray detection for
materials research and medical purposes. In this paper, the
process integration is detailed and system trade-off
considerations are reported.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62882
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