A compact refractometric sensor based on grated silicon photonic wires

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Ridder de, R.M. (2009) A compact refractometric sensor based on grated silicon photonic wires. Sensors and Actuators B: Chemical, 139 (1). pp. 194-198. ISSN 0925-4005

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Abstract:	Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180m has an index sensitivity of $10^{-6}$ assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.
Item Type:	Article
Copyright:	© 2009 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/62805
Official URL:	http://dx.doi.org/10.1016/j.snb.2008.12.023
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