Qualitative and quantitative characterization of outgassing from SU-8

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Melai, Joost and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2009) Qualitative and quantitative characterization of outgassing from SU-8. Microelectronic Engineering, 86 (4-6). pp. 761-764. ISSN 0167-9317

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Abstract:SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques.
With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for crosslinked layers. The effect of hard-bakes is studied in situ by measuring at typical hard-bake temperatures.
These tests indicate that a hard-bake is needed to provide good performance in UHV environments. Using gas-chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.
Item Type:Article
Copyright:© 2009 Elsevier
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62783
Official URL:http://dx.doi.org/10.1016/j.mee.2008.11.008
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