A complete three-dimensional sound intensity sensor integrated on a single chip

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Yntema, D.R. and Honschoten, J.W. van and Wiegerink, R.J. and Elwenspoek, M. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of Micromechanics and Microengineering, 18 (11). pp. 1-9. ISSN 0960-1317

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Abstract:Complete characterization of a sound field requires measurement of both sound pressure and particle velocity. In this paper, we present a three-dimensional acoustic particle velocity sensor chip. Furthermore, a sound pressure sensor was integrated on the same chip, enabling three-dimensional sound intensity measurements. The integration of multiple sensors on a single silicon chip results in highly reproducible sensors and a very small sensor-to-sensor distance allowing for accurate single-point measurements. The latter is demonstrated by measurement of the 3D particle velocity field of a very small (1 × 1 mm2) sound source.
Item Type:Article
Copyright:© 2008 IOP Publishing
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62641
Official URL:http://dx.doi.org/10.1088/0960-1317/18/11/115004
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