The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates

Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Mauczok, R. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2008) The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands.

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Abstract:	Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/62614
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