Further outgassing studies on SU-8


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Melai, Joost and Blanco Carballo, Víctor M. and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2008) Further outgassing studies on SU-8. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands.

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Abstract:SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62609
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