Micromachined Joule-Thomson coolers


Lerou, P.P.P.M. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: Cryogenic Engineering Conference, CEC 2007, 16-20 July 2007, Chattanooga, Tennessee, USA (pp. pp. 614-621).

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Abstract:A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mgĊs-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. © 2008 American Institute of Physics.
Item Type:Conference or Workshop Item
Additional information:AIP Conference Proceedings 985
Copyright:© 2008 American Institute of Physics
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62569
Official URL:https://doi.org/10.1063/1.2908606
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