Mechanical parameter extraction using resonant structures


Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA (pp. pp. 171-176).

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Abstract:In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures have been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112111