A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip


Blanco Carballo, Víctor Manuel and Chefdeville, Maximilien and Fransen, Martin and Graaf, Harry van der and Melai, Joost and Salm, Cora and Schmitz, Jurriaan and Timmermans, Jan (2008) A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE Electron Device Letters, 29 (6). pp. 585-588. ISSN 0741-3106

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Abstract:An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing.
Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
Item Type:Article
Additional information:Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration
Copyright:© 2008 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62384
Official URL:http://dx.doi.org/10.1109/LED.2008.925649
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