A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

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Blanco Carballo, Víctor Manuel and Chefdeville, Maximilien and Fransen, Martin and Graaf, Harry van der and Melai, Joost and Salm, Cora and Schmitz, Jurriaan and Timmermans, Jan (2008) A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE Electron Device Letters, 29 (6). pp. 585-588. ISSN 0741-3106

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Abstract:An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing.
Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
Item Type:Article
Additional information:Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration
Copyright:© 2008 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62384
Official URL:http://dx.doi.org/10.1109/LED.2008.925649
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Metis ID: 251071