Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation


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Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France.

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Abstract:A comb-drive is a structure of interdigitated conductive fingers from which one part is able to move. Electrostatic forces allow the structure to function as an actuator whereas capacitance changes give way to use the structure as a sensor. Such structures became feasible on micrometer scale with the advent of surface micromachining in the late eighties. Since then there has been an overwhelming number of applications of comb-drives both in micro-actuation and sensing. This paper gives an overview of the basic operation of a comb-drive and its applications in sensing and actuation.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62291
Official URL:http://dx.doi.org/10.1117/12.508735
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