Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements

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Altena, G.J. and Dijkstra, M. and Hoekstra, H.J.W.M. and Lambeck, P.V. (2005) Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements. In: 12th European Conference on Integrated Optics (ECIO) 2005, 6-8 April 2005, Grenoble, France.

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Abstract:Membrane waveguides with a thickness of 100nm, fabricated in SiON technology, have been used for the measuring the deflection of moving parts. The smallest displacement that can be detected is less than a nanometre.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62268
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