Design and analysis of a high pressure piezoelectric actuated microvalve

Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317

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Abstract:	A normally open piezoelectric actuated microvalve which modulates a gas flow is fabricated and tested. This work is based on the novel concept of combining micro-machining- and fine machining. The microvalve was tested for air flow. It is shown that a flow rate of 250 ml min-1 for a pressure difference of 4 bars can be achieved. The continuous and controlled flow of gas at any stage of valve operation can be obtained. Additionally, it has been shown that almost no hysteresis occurs during the valve operation and the power consumption is very low.
Item Type:	Article
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/62251
Official URL:	http://dx.doi.org/10.1088/0960-1317/17/11/026
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