Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies

Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Schmitz, J. and Hueting, R.J.E. and Liu, J. and Furukawa, Y. and Mauczok, R. and Keur, W. (2007) Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands.

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Abstract:	To analyze the intrinsic dielectric performance of planar high-density capacitors at radio frequencies (RF), the dielectric losses need to be distinguished from the resistive electrode losses. The resistive losses of the electrodes at RF are de-embedded employing a linear regression procedure with partial compensation for distributed effects. We use tunable ferroelectric capacitors with a barium strontium titanate (BST) dielectric with an inner diameter d ≥ 8 μm on a silicon substrate. The de-embedding of the electrode losses has been successfully performed utilizing 1-Port RF measurement data from of an Advantest R3767CG vector network analyzer (VNA) in the frequency range of 10 MHz – 8 GHz.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/62113
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