Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels


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Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 123-126).

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Abstract:A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62099
Official URL:http://dx.doi.org/10.1109/MEMSYS.2007.4433031
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Metis ID: 245919