Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

Dijkstra, M. and Boer de, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan.

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Abstract:	A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.
Item Type:	Conference or Workshop Item
Copyright:	© 2007 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/62099
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2007.4433031
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