Low-loss $Al_2O_3$ waveguides for active integrated optics

Wörhoff, K. and Bradley, J.D.B. and Ay, F. and Pollnau, M. (2007) Low-loss $Al_2O_3$ waveguides for active integrated optics. In: Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007, 6-11 May 2007, Baltimore, MD, USA.

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Abstract:	Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/62080
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Low-loss waveguides for active integrated optics

Low-loss $Al_2O_3$ waveguides for active integrated optics