Low-loss $Al_2O_3$ waveguides for active integrated optics


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Wörhoff, K. and Bradley, J.D.B. and Ay, F. and Pollnau, M. (2007) Low-loss $Al_2O_3$ waveguides for active integrated optics. In: Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007, 6-11 May 2007, Baltimore, MD, USA.

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Abstract:Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62080
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Metis ID: 245892