Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory
Sparreboom, W. and Eijkel, J.C.T. and van den Berg, A. (2007) Fast etching of sacrificial galvanic coupled metals for nanochannel fabrication: experiments and theory. In: Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference, 7-11 october 2007, Paris.
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|Abstract:||We demonstrate a 10-fold enhancement of the etch rate of sacrificial metals for|
nanochannel fabrication by galvanic coupling. This results in an etch time for the here
examined nanochannels of 10 hours instead of 9 days without galvanic coupling. An
additional feature of our device is that we integrated bare electrodes inside the channel.
Furthermore, we offer a theoretical explanation of the observed etch rate based on mass
|Item Type:||Conference or Workshop Item|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/62038|
|Export this item as:||BibTeX|
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Metis ID: 245818