Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes


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Li, J. and Le Gac, S. and Berg, A. van den (2007) Improved wafer-scale fabrication of aligned pdms-glass microchips with integrated electrodes. In: Eleventh International Conference on Miniaturized Systems for Chemistry and Life Sciences - The proceedings of microTAS 2007 Conference, 7-11 october 2007, Paris (pp. pp. 1756-1758).

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Abstract:We report an improved fabrication process of PDMS-based hybrid chips at the scale of a whole wafer and including an alignment step. This implies a control of the dimension variations of this elastomer upon temperature changes and the production of a PDMS wafer compatible with the use of standard alignment and bonding equipment. We illustrate the applicability of the process for the production of PDMS-glass microchips including electrodes; final alignment in routine was of 40 m at the end of the process.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/62037
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Metis ID: 247037