Low-loss rib waveguides in $Al_{2}O_{3}$ layers for active integrated optical devices

Bradley, J.D.B. and Ay, F. and Wörhoff, K. and Pollnau, M. (2007) Low-loss rib waveguides in $Al_{2}O_{3}$ layers for active integrated optical devices. In: Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007), 17-22 June 2007, Munich, Germany.

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Abstract:	A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/62023
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Low-loss rib waveguides in layers for active integrated optical devices

Low-loss rib waveguides in $Al_{2}O_{3}$ layers for active integrated optical devices