Pressure drop of laminar gas flow in a microchannel containing various pillar matrices


Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of Micromechanics and Microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317

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Abstract:The pressure drop of gas flows in a microchannel filled with a dense pillar matrix was investigated with specific attention to a pillar shape. Pillars of height 250 µm and aspect ratio of about 10 were etched in silicon using an optimized Bosch deep reactive ion etching process. The pressure drop head-loss coefficient due to compression and expansion of gas at the inlet and outlet of the pillar matrix was estimated to be about 1.4 for an opening ratio of 10. A comparison of friction factor correlations for circular pillar cross-sections agreed rather well with the correlations proposed for the macroscale. Experimentally determined friction factor correlations for several pillar cross-sections for Reynolds numbers in the range of 50–500 are presented. Among the various pillar cross-sections considered, sine-shaped pillars have the lowest friction factor. These pillar structures with low pressure drop but a rather large wetted area can be used quite effectively as regenerative materials enabling the development of microcryocoolers.
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Copyright:© 2007 IOP Publishing
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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