Pressure drop of laminar gas flow in a microchannel containing various pillar matrices

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Vanapalli, S. and Brake ter, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of Micromechanics and Microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317

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Abstract:The pressure drop of gas flows in a microchannel filled with a dense pillar matrix was investigated with specific attention to a pillar shape. Pillars of height 250 µm and aspect ratio of about 10 were etched in silicon using an optimized Bosch deep reactive ion etching process. The pressure drop head-loss coefficient due to compression and expansion of gas at the inlet and outlet of the pillar matrix was estimated to be about 1.4 for an opening ratio of 10. A comparison of friction factor correlations for circular pillar cross-sections agreed rather well with the correlations proposed for the macroscale. Experimentally determined friction factor correlations for several pillar cross-sections for Reynolds numbers in the range of 50–500 are presented. Among the various pillar cross-sections considered, sine-shaped pillars have the lowest friction factor. These pillar structures with low pressure drop but a rather large wetted area can be used quite effectively as regenerative materials enabling the development of microcryocoolers.
Item Type:Article
Copyright:© 2007 IOP Publishing
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/61993
Official URL:http://dx.doi.org/10.1088/0960-1317/17/7/021
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