Method of fabrication of a microfluidic device

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Schlautmann, Stefan and Berg, Albert van den and Gardeniers, Johannes Gerardus E. (2007) Method of fabrication of a microfluidic device. Patent.

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Abstract:The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.
Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
Research Group:
Link to this item:http://purl.utwente.nl/publications/61989
Official URL:http://v3.espacenet.com/textdoc?IDX=US2007286773
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