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Method of fabrication of a microfluidic device
Schlautmann, Stefan and Berg van den, Albert and Gardeniers, Johannes Gerardus E. (2007) Method of fabrication of a microfluidic device. Patent.
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| PDF (US2007286773 (A1)) 1534Kb |
| Abstract: | The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate. |
| Item Type: | Patent |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/61989 |
| Official URL: | http://v3.espacenet.com/textdoc?IDX=US2007286773 |
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