An energy-based electroelastic beam model for MEMS applications


Ligterink, N.E. and Patrascu, M. and Breedveld, P.C. and Stramigioli, S. (2005) An energy-based electroelastic beam model for MEMS applications. Sensors and Actuators A: Physical, 121 . pp. 500-507. ISSN 0924-4247

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Abstract:Competent modeling of an electroelastic beam configuration is of major
importance for MEMS. MEMS motors, based on such a deformable capacitor, are driven by one or more voltage sources. A coherent model of limited complexity and expressed in design parameters is derived for an inchworm actuator. The two physical regimes; the stick and non-stick, are matched, such that a smooth, single energy profile arises. The pull-in voltage, the hysteris loop, jump-back
voltage, the step size, and the dissipated energies are determined as function of these design parameters. The results are compared to measurements with the $\mu$Walker.
Item Type:Article
Copyright:© 2005 Elsevier
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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