Electrostatic actuators fabricated by surface micromachining techniques


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Legtenberg, Rob (1996) Electrostatic actuators fabricated by surface micromachining techniques. thesis.

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Abstract:This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.
Item Type:Thesis
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:http://purl.utwente.nl/publications/61701
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Metis ID: 128346