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Electrostatic actuators fabricated by surface micromachining techniques
Legtenberg, Rob (1996) Electrostatic actuators fabricated by surface micromachining techniques. thesis.
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| Abstract: | This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc. |
| Item Type: | Thesis |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Link to this item: | http://purl.utwente.nl/publications/61701 |
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Metis ID: 128346