Optical Anisotropy and Porosity of Anodic Aluminum Oxide Characterized by Spectroscopic Ellipsometry

Kooij, E. Stefan and Wormeester, Herbert and Galca, Aurelian C. and Poelsema, Bene (2003) Optical Anisotropy and Porosity of Anodic Aluminum Oxide Characterized by Spectroscopic Ellipsometry. Electrochemical and Solid-State Letters, 6 (11). B52-B54. ISSN 1099-0062

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Abstract:	Anodic oxidation of aluminum results in a mesoporous oxide film. The thin-film geometry of our samples enables straightforward optical modeling of ellipsometry spectra of fully anodized films, using only three physically relevant parameters. The system of randomly distributed, but aligned cylindrical pores gives rise to an optical anisotropy, which is incorporated using the original work of Bruggeman. The optically determined film thickness and cylinder porosity only agree with electron microscopy results when the oxide is considered as a nanoporous matrix. Upon chemical etching, the cylinder porosity increases with time from 10 to 80%, while the aluminum oxide nanoporosity of 33% hardly changes
Item Type:	Article
Copyright:	© 2003 The Electrochemical Society
Faculty:	Science and Technology (TNW)
Research Group:	Physics of Interfaces and Nanomaterials (PIN)
Link to this item:	http://purl.utwente.nl/publications/61696
Official URL:	http://dx.doi.org/10.1149/1.1615351
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Metis ID: 214148