Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, T. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651

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Abstract:	In this paper we describe a new, simple, and cheap silicon sensor operating at a high temperature of about 1000 K and consuming a very low power of a few milliwatts. We developed a silicon-processing compatible, simple, and low-cost method for processing thermally isolated suspended membranes. This makes the technology more compatible with standard complementary metal oxide semiconductor (CMOS) technology. The essential part of the device is a conductive link of several nanometers in size (the so-called antifuse) formed in between two polysilicon electrodes separated by a thin SiO2 layer. An advantage of the proposed concept is decoupling (i.e., independent control) of the electrical and thermal resistances. The device can be utilized in chemical sensors or chemical microreactors requiring high temperature and very low power consumption, e.g., in portable battery-operated systems. As a direct application, we demonstrate a gas sensor (i.e., Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is about 2% of the power consumed by conventional Pellistors.
Item Type:	Article
Copyright:	The Electrochemical Society
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/61690
Official URL:	http://dx.doi.org/10.1149/1.2217262
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