The electrical conduction and dielectric strength of SU-8

Melai, Joost and Salm, Cora and Smits, Sander and Visschers, Jan and Schmitz, Jurriaan (2009) The electrical conduction and dielectric strength of SU-8. Journal of Micromechanics and Microengineering, 19 (6). 065012. ISSN 0960-1317

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Abstract:	This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications.
Item Type:	Article
Copyright:	© 2009 IOP Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/61330
Official URL:	http://dx.doi.org/10.1088/0960-1317/19/6/065012
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