Kinetic Physical Etching for Versatile Novel Design of Well Ordered Self-Affine Nanogrooves

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Dijken van, Sebastiaan and Bruin de, Dennis and Poelsema, Bene (2001) Kinetic Physical Etching for Versatile Novel Design of Well Ordered Self-Affine Nanogrooves. Physical Review Letters, 86 (20). pp. 4608-4611. ISSN 0031-9007

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Abstract:Ion bombardment at extreme grazing incidence leads to the formation of remarkably well ordered, one to two atomic layer deep, parallel grooves on a Cu(001) surface. These self-organized grooves are oriented parallel to the ion's plane of incidence and their period can be controlled between ∼4 and 15 nm. We have identified two distinct temperature regimes: Between about 200 and 300 K the substrate temperature controls the period, while below 200 to about 150 K the ion energy does. The groove separation distribution shows distinct self-affine character. The physical origin of the novel nanostructures is discussed.
Item Type:Article
Copyright:© 2001 American Physical Society
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/61267
Official URL:http://dx.doi.org/10.1103/PhysRevLett.86.4608
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