Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

Kleijhorst, R.A. and Offerhaus, H.L. and Bant, P. (1998) Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system. Review of Scientific Instruments, 69 (5). pp. 2118-2119. ISSN 0034-6748

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Abstract:	A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.
Item Type:	Article
Copyright:	© 1998 American Institute of Physics
Faculty:	Science and Technology (TNW)
Research Group:	Optical Sciences (OS)
Link to this item:	http://purl.utwente.nl/publications/60500
Official URL:	http://dx.doi.org/10.1063/1.1148908
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