Fabrication, mechanical testing and application of high-pressure glass microreactor chips

Tiggelaar, Roald M. and Benito-Lopez, Fernando and Hermes, Dorothee C. and Rathgen, Helmut and Egberink, Richard J.M. and Mugele, Frieder G. and Reinhoudt, David N. and Berg van den, Albert and Verboom, Willem and Gardeniers, Han J.G.E. (2007) Fabrication, mechanical testing and application of high-pressure glass microreactor chips. Chemical Engineering Journal, 131 (1-3). pp. 163-170. ISSN 1385-8947

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Abstract:	The design, fabrication and high-pressure performance of several in-plane fiber-based interface geometries to microreactor chips for high-pressure chemistry are discussed, and an application is presented. The main investigated design parameters are the geometry of the inlet/outlet structure, the manner in which top and bottom wafer are bonded and the way the inlets/outlets turn over into the microfluidic channels. Destructive pressure experiments with H2O and liquid CO2 showed that the maximum pressure that the proposed inlet/outlet structures can withstand is in the range of 180–690 bar. The optimal geometry for high-pressure microreactor chips is a tubular structure that is etched with hydrofluoric acid (HF) and suitable for fibers with a diameter of 110 μm. These inlets/outlets can withstand pressures up to 690 bar. On the other hand, small powderblasted inlets/outlets that are smoothened with HF and with a sharp transition towards the flow channels are adequate for working pressures up to 300 bar. Microreactor chips with tubular inlet/outlet geometries were used for studying the formation of the carbamic acid of N-benzylmethylamine and CO2. These chips could be used for pressures up to 400 bar without problems/failure, thereby showing that these micromachined microreactor chips are attractive tools for performing high-pressure chemistry in a fast and safe way.
Item Type:	Article
Copyright:	© 2007 Elsevier
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Physics of Complex Fluids (PCF) Biomedical and Environmental Sensor systems (BIOS) Molecular Nanofabrication (MNF) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/60295
Official URL:	http://dx.doi.org/10.1016/j.cej.2006.12.036
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