Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures
Azarov, A.V. and Peters, P.J.M. and Boller, K.-J. (2008) Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures. Applied physics B: Lasers and optics, 90 (3-4). pp. 455-460. ISSN 0946-2171
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| Abstract: | Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Ar- and F2-containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ~ 100 ns (FWHM) and a specific peak power deposition of ~ 1 MW cm-3 bar-1 in a gas mixture containing F2 : Ar : He (0.1%:5%:94.9%), at 2 bar total pressure, a very high peak net gain coefficient of ~30% cm-1 was measured in the gas discharge. The FWHM of the gain waveform was ~ 60 ns |
| Item Type: | Article |
| Copyright: | © 2008 Springer |
| Faculty: | Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/59961 |
| Official URL: | http://dx.doi.org/10.1007/s00340-007-2854-9 |
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